Instruction Via Web-Based Semiconductor Simulation Tools: The Case of "Fundamentals and Design of Microelectronics Processing"

Authors

  • Sanjit Singh Dang University of Illinois at Chicago
  • Christos G. Takoudis University of Illinois at Chicago

Abstract

No abstract available.

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Author Biographies

Sanjit Singh Dang, University of Illinois at Chicago

Sanjit Singh Dang is a chemical engineering graduate student at the University of Illinois at Chicago. He received his Bachelor's degree in chemical engineering from Panjab University, Chandigarh, India in 1997. With Professor C. G. Takoudis, he is conducting research on silicon oxynitrides for use as future ultra-thin dielectrics. He is also interested in growth and passivation of silicon-germanium, and characterization of thin films. His hobbies are movie-making and freelance writing.

Christos G. Takoudis, University of Illinois at Chicago

Christos G. Takoudis is a Professor at UIC. His research interests are in the areas of microfabrication, microelectronic materials, surface chemistry, and heterogenous catalysis.

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Published

1998-09-01

Issue

Vol. 32 No. 4 (1998): Fall 1998

Section

Manuscripts