A Web-Based Course in the Fundamentals of Microelectronics Processing


  • Sanjit Singh Dang University of Illinois at Chicago
  • Raymond A. Matthes University of Illinois at Chicago
  • Christos G. Takoudis University of Illinois at Chicago


No abstract available.

Author Biographies

Sanjit Singh Dang, University of Illinois at Chicago

Sanjit Singh Dang received Bachelor's and PhD degrees in Chemical Engineering from Panjab University, Chandigarh, India (Spring 1997) and University of Illinois at Chicago (Summer 2000), respectively. At UIC, he worked under Prof. C.G. Takoudis on process-property-structure- function relationships of ultra-thin silicon oxynitrides in microelectronics, for which he was presented two national-level research awards. After his PhD completion, he joined Intel Corporation in Santa Clara, California.

Raymond A. Matthes, University of Illinois at Chicago

Raymond Matthes is the Director of Engineering Media Services at the University of Illinois at Chicago. He received his BA in Journalism, Philosophy in Communications, Radio, Television, and Film with a minor in Computer Science from Northwestern University. He is responsible for the development, production, and delivery of multimedia projects on videotape, CD-ROM, and on the Internet. He also maintains the computer systems for the Master of Engineering MEng Program on the Internet, for optimal performance of digital media content production and distribution.

Christos G. Takoudis, University of Illinois at Chicago

Christos G. Takoudis is a Professor at UIC. He received his Diploma in chemical engineering from the National Technical University of Athens, Greece, and his PhD from the University of Minnesota. His interests are in the areas of microelectronic materials and processing, heteroepitaxy in group IV materials, ultra-thin dielectrics, surface chemistry, in-situ spectroscopies at interfaces, and heterogeneous catalysis.