Layout-Aware Compact Model of MOSFET Characteristics Variations Induced by STI Stress

Authors

  • Kenta YAMADA
  • Takashi SATO
  • Shuhei AMAKAWA
  • Noriaki NAKAYAMA
  • Kazuya MASU
  • Shigetaka KUMASHIRO

Published

2008-07-01

Issue

Section

Papers