Accurate Modeling Method for Cu Interconnect

Authors

• Kenta YAMADA
• Hiroshi KITAHARA
• Yoshihiko ASAI
• Hideo SAKAMOTO
• Norio OKADA
• Makoto YASUDA
• Noriaki ODA
• Michio SAKURAI
• Masayuki HIROI
• Toshiyuki TAKEWAKI
• Sadayuki OHNISHI
• Manabu IGUCHI
• Hiroyasu MINDA
• Mieko SUZUKI