Accurate Modeling Method for Cu Interconnect

Authors

  • Kenta YAMADA
  • Hiroshi KITAHARA
  • Yoshihiko ASAI
  • Hideo SAKAMOTO
  • Norio OKADA
  • Makoto YASUDA
  • Noriaki ODA
  • Michio SAKURAI
  • Masayuki HIROI
  • Toshiyuki TAKEWAKI
  • Sadayuki OHNISHI
  • Manabu IGUCHI
  • Hiroyasu MINDA
  • Mieko SUZUKI

Published

2008-06-01

Issue

Section

Papers