Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films

Authors

• A-Ram CHOI
• Sang-Sik CHOI
• Byung-Guan PARK
• Dongwoo SUH
• Gyungock KIM
• Jin-Tae KIM
• Jin-Soo CHOI
• Deok-Ho CHO
• Tae-Hyun HAN
• Kyu-Hwan SHIM