Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films

Authors

  • A-Ram CHOI
  • Sang-Sik CHOI
  • Byung-Guan PARK
  • Dongwoo SUH
  • Gyungock KIM
  • Jin-Tae KIM
  • Jin-Soo CHOI
  • Deok-Ho CHO
  • Tae-Hyun HAN
  • Kyu-Hwan SHIM

Published

2008-05-01

Issue

Section

Papers