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  3. Vol. E90-C, No. 12 December 2007 /
  4. Papers

An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography

Authors

  • Zhen MA
  • David M. KLYMYSHYN
  • Sven ACHENBACH
  • Martin BORNER
  • Nina DAMBROWSKY
  • Jurgen MOHR

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Published

2007-12-01

Issue

Vol. E90-C, No. 12 December 2007

Section

Papers

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