Evaluation of Dielectric Reliability of Ultrathin HfSiO<SUB>x</SUB>N<SUB>y</SUB> in Metal-Gate Capacitors

Authors

  • Yanli PEI
  • Hideki MURAKAMI
  • Seiichiro HIGASHI
  • Seiichi MIYAZAKI
  • Seiji INUMIYA
  • Yasuo NARA

Published

2007-05-01

Issue

Section

Papers