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  3. Vol. E90-C, No. 1 January 2007 /
  4. Invited Papers

Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications

Authors

  • Shinji MATSUI
  • Reo KOMETANI

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Published

2007-01-01

Issue

Vol. E90-C, No. 1 January 2007

Section

Invited Papers

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