A Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors

Authors

• Ryoichi ISHIHARA
• Arie GLAZER
• Yoel RAAB
• Peter RUSIAN
• Mannie DORFAN
• Benzi LAVI
• Ilya LEIZERSON
• Albert KISHINEVSKY
• Yvonne van ANDEL
• Xin CAO
• Wim METSELAAR
• Kees BEENAKKER
• Sara STOLYAROVA
• Yael NEMIROVSKY