Influence of NH<SUB>3</SUB>-Plasma Pretreatment before Si<SUB>3</SUB>N<SUB>4</SUB> Passivation Film Deposition on Current Collapse in AlGaN/GaN-HEMTs

Authors

• Shinichi HOSHI
• Toshiharu MARUI
• Masanori ITOH
• Yoshiaki SANO
• Shouhei SEKI