Decananometer Surrounding Gate Transistor (SGT) Scalability by Using an Intrinsically-Doped Body and Gate Work Function Engineering

Authors

  • Yasue YAMAMOTO
  • Takeshi HIDAKA
  • Hiroki NAKAMURA
  • Hiroshi SAKURABA
  • Fujio MASUOKA

Published

2006-04-01

Issue

Section

Papers