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  3. Vol. E88-C, No. 5 May 2005 /
  4. Papers

High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter

Authors

  • Satoshi UENO
  • Toshiki NAGANAWA
  • Yasuo KOKUBUN

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Published

2005-05-01

Issue

Vol. E88-C, No. 5 May 2005

Section

Papers

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