Gate-Last MISFET Structures and Process for Characterization of High-k and Metal Gate MISFETs

Authors

  • Takeo MATSUKI
  • Kazuyoshi TORII
  • Takeshi MAEDA
  • Yasushi AKASAKA
  • Kiyoshi HAYASHI
  • Naoki KASAI
  • Tsunetoshi ARIKADO

Published

2005-05-01

Issue

Section

Papers