Electrical Characterization of Aluminum-Oxynitride Stacked Gate Dielectrics Prepared by a Layer-by-Layer Process of Chemical Vapor Deposition and Rapid Thermal Nitridation

Authors

  • Hideki MURAKAMI
  • Wataru MIZUBAYASHI
  • Hirokazu YOKOI
  • Atsushi SUYAMA
  • Seiichi MIYAZAKI

Published

2005-04-01

Issue

Section

Papers