Role of Hydrogen in Polycrystallne Si by Excimer Laser Annealing

Authors

  • Naoya KAWAMOTO
  • Naoto MATSUO
  • Atsushi MASUDA
  • Yoshitaka KITAMON
  • Hideki MATSUMURA
  • Yasunori HARADA
  • Tadaki MIYOSHI
  • Hiroki HAMADA

Published

2005-02-01