Practical Design of Experiments for the Next Generation of Semiconductor Process Engineers

Authors

  • Sumant S. Patankar University of Florida

DOI:

https://doi.org/10.18260/2-1-370.660-134701

Abstract

The semiconductor industry offers ample employment opportunities for chemical engineers. The CHIPS Act prioritizes workforce training as a key contributor to the success and growth of semiconductor manufacturing. UF ChE teaches semiconductor processing lab modules to both undergraduate and graduate students. At the graduate level UF ChE offers training in the design of semiconductor experiments through lectures as well as lab modules. This paper discusses the use of photolithography experiments for practical design of experiments (DOE) training.

Author Biography

Sumant S. Patankar, University of Florida

Sumant S. Patankar, PhD, is an Instructional Assistant Professor at the University of Florida.  His teaching interests focus on semiconductor processing, design of experiments, and data science. He teaches a lab class designed for master’s students that includes semiconductor processing experiments. Previously, he worked at Intel Corporation for four years and brings his real-world semiconductor manufacturing experience into the classroom to help students.

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Published

2024-08-20

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Section

Manuscripts