Practical Design of Experiments for the Next Generation of Semiconductor Process Engineers
DOI:
https://doi.org/10.18260/2-1-370.660-134701Abstract
The semiconductor industry offers ample employment opportunities for chemical engineers. The CHIPS Act prioritizes workforce training as a key contributor to the success and growth of semiconductor manufacturing. UF ChE teaches semiconductor processing lab modules to both undergraduate and graduate students. At the graduate level UF ChE offers training in the design of semiconductor experiments through lectures as well as lab modules. This paper discusses the use of photolithography experiments for practical design of experiments (DOE) training.