Lab-Based Unit Operations in Microelectronics Processing

Authors

  • Chih-hung (Alex) Chang Oregon State University
  • Milo D. Koretsky Oregon State University
  • Sho Kimura Oregon State University
  • Skip Rochefort Oregon State University
  • Cyndie Shaner Oregon State University

Abstract

Summer School Poster Session Paper
The chemical engineering department at Oregon State University is committed to developing strength in microelectronics processing. To this end, we are developing curricular and experimental modules from selected unit operations common in the microelectronics industry and are integrating these into the classroom and the laboratory. The curricular modules are intended to reinforce core ChE fundamentals with examples from microelectronics processing. The lab modules provide students with hands-on learning in this are as well as more open-ended problem-solving experiences.

Author Biographies

Chih-hung (Alex) Chang, Oregon State University

Chih-hung (Alex) Chang is Assistant Professor of Chemical Engineering at OSU. He received his BS degree from National Taiwan University and his PhD degree from the University of Florida, both in chemical engineering. His research interests include phase equilibria, photovoltaics, X-ray absorption, fine structure, electronic materials, and nano- and microtechnology

Milo D. Koretsky, Oregon State University

Milo D. Koretsky is Associate Professor of Chemical Engineering at OSU. He received his BS and MS degrees from UCSD and his PhD from UC Berkeley, all in chemical engineering. His research interests are in thin film materials processing, including plasma etching, chemical vapor deposition, electrochemical processes, and chemical process statistics.

Sho Kimura, Oregon State University

Sho Kimura is Professor of Chemical Engineering at OSU. His research interests cover high-temperature materials synthesis, nano-sized materials synthesis, surface modifications, applications of high-temperature fluidization technology, reaction kinetics, catalytic effects on gas-solid reactions, and reactor design and simulations.

Skip Rochefort, Oregon State University

Skip Rochefort is Associate Professor of Chemical Engineering at OSU. He received his BS degree from UMass, his MS degree from Northwestern, and his PhD from UCSD, all in chemical engineering. His research interests are in all areas of polymer engineering and science and in engineering education.

Cyndie Shaner, Oregon State University

Cyndie Shaner served as the Linus Pauling Distinguished Engineer at OSU from 2000 to 2002. She received her BS degree in chemical engineering from Northwestern University and has had 22 years industrial experience with Chevron.

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Published

2003-07-01

Issue

Vol. 37 No. 3 (2003): Summer 2003

Section

Summer School Special Section